IS200 Ion Source
Differentially pumped extractor type ion source with Focus and XY-deflection unit
Description
The IS 200 is a differentially pumped extractor type ion source ideally suited in depth profiling but also for sample cleaning. Thesource’s sturdy design guarantees stable operating conditions over a long period of time, even with the use of reactive gases.
Small spot sizes and a XY-deflection unit (+/- 5 mm) also allow for cleaning SPM tips. High emission currents are provided even at low beam energies, with the primary energy range reaching from 0.2 to 5 keV and working pressures as low as 10-8 mbar. Spot size and current density can be adjusted using two focous lenses.
IS 200 Ion Source
| Design | Differentially pumped extractor type ion source with Focus and XY-deflection unit |
| Primary energy range | 0.2 – 3 keV |
| Total current | Typically 15 μA |
| Working pressure | down to 10-8 mbar |
| Spot size (FWHM) | 0.5 mm (at 30 mm working distance) |
| Mounting flange | DN40CF |
| Insertion depth | 163 mm |
| Working distance | 10 mm |
| Bakeable | up to 250°C |
PS-IS 200 Power Supply
| Display | Ion energy, extractor voltage, emission current, deflection voltages |
| Dimensions (W x H x D) | 19’’ x 133 mm x 415 mm |
